Yes, maybe you need to install remote components for debugging on Surface Pro 3. And the x64 version of VS Update 3 should be suitable for you.
Once you have installed Remote Tools, select "Remote Debugger" on the "Start" screen. The remote debugging configuration appears when you first start the remote debugger.
In the Remote Debug Configuration dialog box:
If the Windows Web Services API is not installed, select Install
In the "Configure Windows Firewall" group, select the networks to which you want to allow connections. Only the networks to which the device is connected are included. You must select at least one network.
Select Configure Remote Debugging to set firewall options and launch the remote debugger. Open the Visual Studio Remote Debugging Monitor dialog box to grant users rights to remote tools and set other advanced options.
The Visual Studio Remote Debugging Monitor dialog box appears. You can grant users rights to remote tools and set another advanced option in this dialog box. Here you can find the necessary information.
Choosing a remote device for C # and VB projects:
Select the project name in Solution Explorer and then select "Properties" in the context menu.
Select "Debug".
Select Remote Computer from the list of target device.
Enter the network name of the remote device in the Remote Machine field or select Find to select a device in the Select Remote Debugger dialog box.
You start, stop, and move a remote debugging session in the same way as a local session. Before debugging, make sure that a remote debug monitor is installed on the remote device.
Then select "Start Debugging" in the "Debug" menu ("Keyboard: F5"). The project is recompiled, then deployed and run on the remote device. The debugger pauses execution at breakpoints, and you can enter, exit, and exit your code. Select Disable Debugging to end the debugging session and close the remote application.
Source: http://msdn.microsoft.com/en-us/library/windows/apps/hh441469.aspx