It is safe to underline one at a time, although you should not use two consecutive underscores. From the C # language specification, section 2.4.2:
Identifiers containing two consecutive underscores (U + 005F) are reserved for use by the implementation. For example, an implementation may provide advanced keywords starting with two underscores.
Personally, I try to avoid type names with underscores, though ... I'm not sure what you mean by "replace for . ". If you could give some context, that would help.
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